We report about a new technique for the investigation of SAW fields within SAW devices reaching submicron lateral resolution. The scanning acoustic force microscope (SAFM) is based on a standard force microscope and utilizes the nonlinear force curve in the sense of a mechanical diode. Varying wave amplitudes therefore lead to different shifts of the cantilever's rest position. With SAFM we investigated SAW devices with center frequencies above 600 MHz. We found a local effect of massloading on the standing wave amplitude within IDTs. Furthermore, we measured the dynamic behavior of the IDT's wave pattern when sweeping the frequency.
